Invention Grant
- Patent Title: Surface treatment agent and surface treatment method
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Application No.: US15268904Application Date: 2016-09-19
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Publication No.: US10093815B2Publication Date: 2018-10-09
- Inventor: Daijiro Mori , Akira Kumazawa
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2015-186986 20150924; JP2016-122761 20160621
- Main IPC: C09D7/00
- IPC: C09D7/00 ; C09D7/63 ; B08B3/04 ; C09D5/00 ; H01L21/02 ; H01L21/306 ; H01L21/3105 ; G03F7/40 ; C08K5/34
Abstract:
A surface treatment agent capable of effectively preventing pattern collapse of an inorganic pattern or a resin pattern provided on a substrate, and a surface treatment method using such a surface treatment agent. The surface treatment agent includes a silylation agent and a nitrogen-containing heterocyclic compound which does not include a silicon atom.
Public/Granted literature
- US20170088722A1 SURFACE TREATMENT AGENT AND SURFACE TREATMENT METHOD Public/Granted day:2017-03-30
Information query
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