Invention Grant
- Patent Title: Colloidal silica polishing composition and method for manufacturing synthetic quartz glass substrates using the same
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Application No.: US14222709Application Date: 2014-03-24
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Publication No.: US10093833B2Publication Date: 2018-10-09
- Inventor: Harunobu Matsui , Daijitsu Harada , Masaki Takeuchi
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2013-076955 20130402
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C09K3/14 ; B24B37/04

Abstract:
A polishing composition comprising a colloidal dispersion of spherical silica particles and associated silica particles as abrasive is provided. When used in the step of polishing synthetic quartz glass substrates, the polishing composition ensures a higher polishing rate than conventional colloidal silica and is effective for preventing any microscopic defects on the substrate surface, thus providing the substrate with a high smoothness. The polishing composition can be used as the ceria replacement polishing composition for polishing a lapped surface.
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