Invention Grant
- Patent Title: Flow sensor arrangement
-
Application No.: US14976799Application Date: 2015-12-21
-
Publication No.: US10094691B2Publication Date: 2018-10-09
- Inventor: Harry Figi , Mark Hornung , Robert Wuest
- Applicant: Sensirion AG
- Applicant Address: CH Stafa
- Assignee: Sensirion AG
- Current Assignee: Sensirion AG
- Current Assignee Address: CH Stafa
- Agency: Cooper & Dunham LLP
- Priority: EP14004363 20141222
- Main IPC: G01F1/688
- IPC: G01F1/688 ; G01F15/02

Abstract:
A flow sensor arrangement for determining the flow of a fluid comprises a substrate. A heater is arranged in or on the substrate as well as at least one first thermocouple for generating a first signal proportional to a temperature difference between a location downstream from the heater and a first reference location, and at least one second thermocouple for generating a second signal proportional to a temperature difference between a location upstream from the heater and a second reference location which second reference location is different from the first reference location. In addition, at least one third thermocouple is arranged in or on the substrate for generating a third signal proportional to a temperature difference between the first reference location and the second reference location. Means are provided for determining a sensing signal indicative of the flow of the fluid over the heater and the first and the second thermocouple dependent on the first signal, the second signal and the third signal.
Public/Granted literature
- US20160216144A1 FLOW SENSOR ARRANGEMENT Public/Granted day:2016-07-28
Information query