Invention Grant
- Patent Title: Determining apparatus for determining object stored in cassette
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Application No.: US15666215Application Date: 2017-08-01
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Publication No.: US10094951B2Publication Date: 2018-10-09
- Inventor: Ken Togashi , Masahiro Tsukamoto
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP2016-158408 20160812
- Main IPC: G01V8/20
- IPC: G01V8/20

Abstract:
Apparatus determines whether a stored object is a wafer alone or a frame unit formed by uniting the wafer and a ring frame. The apparatus includes first and second detecting units, the second detecting unit being stored more shallowly than the first detecting unit. The apparatus determines whether light transmitted by the first detecting unit is blocked by the object and does not reach a light receiving portion of the first detecting unit. When light transmitted from the second detecting unit is blocked by the object and does not reach a light receiving portion of the second detecting unit, the apparatus determines that the object is the frame unit, whereas when the light transmitted from the second detecting unit is not blocked by the object and reaches the light receiving portion of the second detecting unit, the apparatus determines that the object is the wafer.
Public/Granted literature
- US20180045851A1 DETERMINING APPARATUS FOR DETERMINING OBJECT STORED IN CASSETTE Public/Granted day:2018-02-15
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