Invention Grant
- Patent Title: Field-stop reverse conducting insulated gate bipolar transistor and manufacturing method therefor
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Application No.: US14392251Application Date: 2014-06-05
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Publication No.: US10096699B2Publication Date: 2018-10-09
- Inventor: Shuo Zhang , Qiang Rui , Genyi Wang , Xiaoshe Deng
- Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Applicant Address: CN
- Assignee: CSMC Technologies Fab1 Co., Ltd.
- Current Assignee: CSMC Technologies Fab1 Co., Ltd.
- Current Assignee Address: CN
- Agency: Widerman Malek, PL
- Agent Mark Malek; Daniel Pierron
- Priority: CN201310265445 20130627
- International Application: PCT/CN2014/079250 WO 20140605
- International Announcement: WO2014/206189 WO 20141231
- Main IPC: H01L29/73
- IPC: H01L29/73 ; H01L21/02 ; H01L29/739 ; H01L29/66 ; H01L29/06 ; H01L29/08 ; H01L21/265 ; H01L21/28 ; H01L21/285 ; H01L21/311 ; H01L21/324 ; H01L29/40 ; H01L29/417 ; H01L29/423 ; H01L29/49

Abstract:
A field-stop reverse conducting insulated gate bipolar transistor and a manufacturing method therefor. The transistor comprises a terminal structure (200) and an active region (100). An underlayment of the field-stop reverse conducting insulated gate bipolar transistor is an N-type underlayment, the back surface of the underlayment is provided with an N-type electric field stop layer (1), one surface of the electric field stop layer departing from the underlayment is provided with a back-surface P-type structure (10), and the surface of the back-surface P-type structure is provided with a back-surface metal layer (12). A plurality of notches (11) which penetrate through the back-surface P-type structure (10) from the back-surface metal layer (12) to the electric field stop layer (1) are formed in the active region (100), and metals of the back-surface metal layer (12) are filled into the notches (11) to form a metal structure which extends into the electric field stop layer (1).
Public/Granted literature
- US20160163841A1 FIELD-STOP REVERSE CONDUCTING INSULATED GATE BIPOLAR TRANSISTOR AND MANUFACTURING METHOD THEREFOR Public/Granted day:2016-06-09
Information query
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