Invention Grant
- Patent Title: Method for thin-film via segments in photovoltaic device
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Application No.: US15111975Application Date: 2015-01-26
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Publication No.: US10096731B2Publication Date: 2018-10-09
- Inventor: Roger Ziltener , Thomas Netter
- Applicant: FLISOM AG
- Applicant Address: CH Duebendorf
- Assignee: FLISOM AG
- Current Assignee: FLISOM AG
- Current Assignee Address: CH Duebendorf
- Agency: Patterson & Sheridan, LLP
- Priority: WOPCT/IB2014/058708 20140131; WOPCT/EP2014/025031 20141231
- International Application: PCT/IB2015/050555 WO 20150126
- International Announcement: WO2015/114498 WO 20150806
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/0725 ; H01L31/0687 ; H01L31/0352 ; H01L31/0463 ; H01L31/0749

Abstract:
A method for vias and monolithic interconnects in thin-film optoelectronic devices (100, 200) wherein at least one line segment via hole (163, 165, 165′, 167) is formed by laser drilling and passes through front-contact layers (150, 152, 154, 156, 158) and semiconductive active layer (130), and wherein laser drilling causes forming a CIGS-type wall (132, 134, 136, 138) of electrically conductive permanently metalized copper-rich CIGS-type alloy at the inner surface (135) of the via hole, thereby forming a conductive path between at least a portion of front-contact and a portion of back-contact layers (120, 124, 126, 128, 129), forming a bump-shaped raised portion (155) at the surface of the front-contact layer, forming a raised portion (125, 127, 127′) of the back-contact layer, and optionally forming a raised portion of copper-rich CIGS-type alloy (155′) covering a portion of the front-contact layer (150). A thin-film CIGS device comprises at least one line segment via hole obtainable by the method.
Public/Granted literature
- US20160359065A1 METHOD FOR THIN-FILM VIA SEGMENTS IN PHOTOVOLTAIC DEVICE Public/Granted day:2016-12-08
Information query
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