Invention Grant
- Patent Title: Expansion sheet, expansion sheet manufacturing method, and expansion sheet expanding method
-
Application No.: US15608477Application Date: 2017-05-30
-
Publication No.: US10103055B2Publication Date: 2018-10-16
- Inventor: Shinichi Fujisawa , Ryoji Tanimoto
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP2016-110320 20160601
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/02 ; H01L21/67
Abstract:
An expansion sheet is adapted to be held and expanded by an expanding apparatus when a platelike workpiece is attached to the expansion sheet. The expansion sheet has a peripheral area around the workpiece where the expansion sheet is adapted to be held by first, second, third, and fourth holding units that are moveable away from each other. The expansion sheet includes a base sheet and an adhesive layer formed on the base sheet, the adhesive layer having adhesion adapted to be reduced by applying ultraviolet light. The adhesion of the adhesive layer in the peripheral area of the expansion sheet is lower than that in the other area of the expansion sheet.
Public/Granted literature
- US20170352588A1 EXPANSION SHEET, EXPANSION SHEET MANUFACTURING METHOD, AND EXPANSION SHEET EXPANDING METHOD Public/Granted day:2017-12-07
Information query
IPC分类:
