Invention Grant
- Patent Title: Memory device
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Application No.: US15481609Application Date: 2017-04-07
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Publication No.: US10103165B2Publication Date: 2018-10-16
- Inventor: Young Hwan Son , Won Chul Jang , Dong Seog Eun , Jae Hoon Jang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse P.C.
- Priority: KR10-2016-0089271 20160714
- Main IPC: H01L27/11568
- IPC: H01L27/11568 ; H01L27/11578 ; H01L27/11582 ; H01L27/11556 ; H01L23/528 ; H01L27/11519 ; H01L27/11565

Abstract:
A memory device includes a gate structure including a plurality of gate electrode layers stacked on an upper surface of a substrate, a plurality of vertical holes extending in a direction perpendicular to the upper surface of the substrate to penetrate through the gate structure, and a plurality of vertical structures in the plurality of vertical holes, respectively, each vertical structure of the plurality of vertical structures including an embedded insulating layer, and a plurality of channel layers separated from each other, the plurality of channel layers being outside the embedded insulating layer.
Public/Granted literature
- US20180019257A1 MEMORY DEVICE Public/Granted day:2018-01-18
Information query
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