A method for manufacturing a power semiconductor device includes: forming a drift region of a first conductivity type, a second emitter region of a second conductivity type, a pn-junction between the second emitter region and drift region, and a first emitter region having a first doping region of the first conductivity type and a second doping region of the first conductivity type; forming a first emitter metallization in contact with the first emitter region to form an ohmic contact between the first emitter metallization and the first doping region, and to form a non-ohmic contact between the first emitter metallization and the second doping region; and forming a second emitter metallization in contact with the second emitter region. The first emitter region is formed using a mask that is aligned with respect to the second emitter region, so that the first and second doping regions are formed in aligned relation.