Invention Grant
- Patent Title: Photolithography method
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Application No.: US14895180Application Date: 2015-06-09
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Publication No.: US10108092B2Publication Date: 2018-10-23
- Inventor: Eun-Ah You
- Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Applicant Address: KR Daejeon
- Assignee: Korea Research Institute of Standards and Science
- Current Assignee: Korea Research Institute of Standards and Science
- Current Assignee Address: KR Daejeon
- Agency: McCoy Russell LLP
- Priority: KR10-2015-0007101 20150115
- International Application: PCT/KR2015/005768 WO 20150609
- International Announcement: WO2016/114455 WO 20160721
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/00 ; G03F7/038 ; G03F7/039 ; G03F7/16 ; G03F7/32 ; G03F1/00 ; G03F1/50

Abstract:
Provided is a photolithography method, including: a) forming a photoresist layer satisfying D=m*(λ/2n) (D is a thickness of the photoresist layer, n is a refractive index of the photoresist, λ is a wavelength of irradiated light at the time of exposure, and m is a natural number of 1 or more) on a substrate; and b) manufacturing a photoresist pattern having a ring shape by exposing the photoresist layer and developing the exposed photoresist layer using a photo mask including a transparent substrate and a plate-type metal dot contacting a light emitting surface of the transparent substrate.
Public/Granted literature
- US20170307980A1 PHOTOLITHOGRAPHY METHOD Public/Granted day:2017-10-26
Information query
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