Invention Grant
- Patent Title: Silicon nitride circuit board and electronic component module using the same
-
Application No.: US15548035Application Date: 2016-01-26
-
Publication No.: US10109555B2Publication Date: 2018-10-23
- Inventor: Hiromasa Kato , Noboru Kitamori , Takayuki Naba , Masashi Umehara
- Applicant: KABUSHIKI KAISHA TOSHIBA , TOSHIBA MATERIALS CO., LTD.
- Applicant Address: JP Tokyo JP Yokohama-shi
- Assignee: Kabushiki Kaisha Toshiba,Toshiba Materials Co., Ltd.
- Current Assignee: Kabushiki Kaisha Toshiba,Toshiba Materials Co., Ltd.
- Current Assignee Address: JP Tokyo JP Yokohama-shi
- Agency: Harness, Dickey & Pierce, PLC
- Priority: JP2015-018515 20150202
- International Application: PCT/JP2016/052190 WO 20160126
- International Announcement: WO2016/125635 WO 20160811
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/373 ; H01L21/48

Abstract:
The present invention provides a silicon nitride circuit board in which metal plates are attached on front and rear sides of a silicon nitride substrate having a three-point flexural strength of 500 MPa or higher, wherein assuming that a thickness of the metal plate on the front side is denoted by t1, and a thickness of the metal plate on the rear side is denoted by t2, a numerical relation: |t1−t2|≥0.30 mm is satisfied, and a warp is formed in the silicon nitride substrate so that the silicon nitride substrate is convex toward the metal plate on one of the front side or the rear side; and warp amounts of the silicon nitride substrate in a long-side direction and a short-side direction both fall within a range from 0.01 to 1.0 mm. It is preferable that a longitudinal width (L1) of the silicon nitride substrate falls within a range from 10 to 200 mm, and a transverse width (L2) of the silicon nitride substrate falls within a range from 10 to 200 mm. Due to above structure, even if the silicon nitride circuit board has a large difference in thickness between the metal plates attached on front and rear sides of the silicon nitride substrate, TCT properties can be greatly improved.
Public/Granted literature
- US20180019182A1 SILICON NITRIDE CIRCUIT BOARD AND ELECTRONIC COMPONENT MODULE USING THE SAME Public/Granted day:2018-01-18
Information query
IPC分类: