Invention Grant
- Patent Title: Crack deflector structure for improving semiconductor device robustness against saw-induced damage
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Application No.: US14536897Application Date: 2014-11-10
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Publication No.: US10109597B2Publication Date: 2018-10-23
- Inventor: Jeffrey Alan West , Thomas D. Bonifield , Basab Chatterjee
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L23/00 ; H01L23/58

Abstract:
An integrated circuit containing a crack deflecting scribe seal which separates an interior region of the integrated circuit from a scribeline immediately outside the integrated circuit and a method of forming the same. The crack deflecting scribe seal includes continuous metal layers and continuous contacts and continuous vias between the continuous metal layers. The continuous metal layers do not extend past the continuous contacts and continuous vias. The continuous contacts and continuous vias are recessed from edges of the underlying continuous metal layers on the scribeline side of the scribe seal, providing an angled outer surface on the scribe seal which may desirably terminate crack propagation or deflect crack propagation upward to a top surface of the scribeline or the crack deflecting scribe seal.
Public/Granted literature
- US20150061081A1 CRACK DEFLECTOR STRUCTURE FOR IMPROVING SEMICONDUCTOR DEVICE ROBUSTNESS AGAINST SAW-INDUCED DAMAGE Public/Granted day:2015-03-05
Information query
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