Invention Grant
- Patent Title: Thin film transistor, thin film transistor substrate, liquid crystal display device, and method of manufacturing thin film transistor
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Application No.: US15805175Application Date: 2017-11-07
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Publication No.: US10109656B2Publication Date: 2018-10-23
- Inventor: Takaharu Konomi , Kazunori Inoue
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2016-223974 20161117
- Main IPC: G02F1/136
- IPC: G02F1/136 ; H01L27/12 ; H01L29/786 ; G02F1/1368 ; H01L29/66 ; G02F1/1362

Abstract:
It is an object to provide a technique capable of suppressing a damage on a semiconductor channel layer due to a process of forming a source electrode and a drain electrode and also suppressing a short channel effect. A thin film transistor includes a gate electrode, a first insulating film, a source electrode, a drain electrode, a second insulating film, and a semiconductor channel layer that includes an oxide semiconductor. The second insulating film is disposed on the first insulating film, the source electrode, and the drain electrode. The semiconductor channel layer is electrically connected to the source electrode and the drain electrode via a first contact hole and a second contact hole provided in the second insulating film.
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Information query
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