Invention Grant
- Patent Title: Method of forming high-germanium content silicon germanium alloy fins on insulator
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Application No.: US15614013Application Date: 2017-06-05
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Publication No.: US10109737B2Publication Date: 2018-10-23
- Inventor: Pouya Hashemi , Renee T. Mo , John A. Ott , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Daniel P. Morris, Esq.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/02 ; H01L27/12

Abstract:
A method of forming high germanium content silicon germanium alloy fins with controlled insulator layer recessing is provided. A silicon germanium alloy (SiGe) layer having a first germanium content is provided on a surface of an insulator layer using a first condensation process. Following the formation of a hard mask layer portion on the SiGe layer, a second condensation process is performed to convert a portion of the SiGe layer into a SiGe fin of a second germanium content that is greater than the first germanium content and other portions of the SiGe layer into a shell oxide structure located on sidewalls of the SiGe fin. After forming a fin placeholder material, a portion of each shell oxide structure is removed, while maintaining a lower portion of each shell oxide structure at the footprint of the SiGe fin.
Public/Granted literature
- US20170271502A1 METHOD OF FORMING HIGH-GERMANIUM CONTENT SILICON GERMANIUM ALLOY FINS ON INSULATOR Public/Granted day:2017-09-21
Information query
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