Invention Grant
- Patent Title: Carrier adapter insert apparatus and carrier adapter insert detection methods
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Application No.: US14332976Application Date: 2014-07-16
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Publication No.: US10115616B2Publication Date: 2018-10-30
- Inventor: John J. Mazzocco , Edward Ng , Douglas MacLeod , David Phillips , Ayan Majumdar , Jeffrey C. Hudgens
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/673 ; G01V8/12
Abstract:
Methods, apparatus, and assemblies are provided for an adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.
Public/Granted literature
- US20150022821A1 CARRIER ADAPTER INSERT APPARATUS AND CARRIER ADAPTER INSERT DETECTION METHODS Public/Granted day:2015-01-22
Information query
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