Invention Grant
- Patent Title: Methods and apparatus for three-dimensional nonvolatile memory
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Application No.: US15445734Application Date: 2017-02-28
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Publication No.: US10115770B2Publication Date: 2018-10-30
- Inventor: Jongsun Sel , Daewung Kang , Michiaki Sano , Yohei Yamada , Mitsuteru Mushiga , Tuan Pham
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SanDisk Technologies LLC
- Current Assignee: SanDisk Technologies LLC
- Current Assignee Address: US TX Addison
- Agency: Vierra Magen Marcus LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/115 ; H01L21/8234 ; H01L27/24 ; H01L45/00 ; H01L29/78 ; H01L21/306

Abstract:
A method is provided that includes forming a dielectric material and a first sacrificial material above a substrate, forming a second sacrificial material above the substrate and disposed adjacent the dielectric material and the first sacrificial material, forming a first hole in the second sacrificial material, the first hole disposed in a first direction, forming a word line layer above the substrate via the first hole, the word line layer disposed in a second direction perpendicular to the first direction, forming a first portion of a nonvolatile memory material on peripheral sides of the word line layer via the first hole, forming a second hole in the second sacrificial material, forming a second portion of the nonvolatile memory material on a sidewall of the second hole, forming a local bit line in the second hole, and forming a memory cell including the nonvolatile memory material at an intersection of the local bit line and the word line layer.
Public/Granted literature
- US20180247976A1 METHODS AND APPARATUS FOR THREE-DIMENSIONAL NONVOLATILE MEMORY Public/Granted day:2018-08-30
Information query
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