An organic light emitting display device includes a plurality of first electrodes, a pixel defining layer, a first intermediate layer, a fluorine-containing layer, an emitting layer and a second electrode. The first electrodes are spaced apart from each other on a substrate. The pixel defining layer is disposed on the substrate. The pixel defining layer partially exposes the first electrodes. The first intermediate layer is disposed on the substrate, the pixel defining layer and the exposed first electrodes. The fluorine-containing layer is formed on a portion of the first intermediate layer overlapping an upper surface of the pixel defining layer. The fluorine-containing layer includes fluorine diffused from the pixel defining layer or the first intermediate layer. The emitting layer is at least partially disposed on a portion of the first intermediate layer not including the fluorine-containing layer thereon. The second electrode is disposed on the emitting layer.