Invention Grant
- Patent Title: Recessed high voltage metal oxide semiconductor transistor for RRAM cell
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Application No.: US14726071Application Date: 2015-05-29
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Publication No.: US10115819B2Publication Date: 2018-10-30
- Inventor: Harry Yue Gee , Tanmay Kumar , Natividad Vasquez, Jr. , Steven Patrick Maxwell , Sundar Narayanan
- Applicant: Crossbar, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: CROSSBAR, INC.
- Current Assignee: CROSSBAR, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L27/24 ; H01L29/78 ; H01L45/00 ; H01L29/66

Abstract:
A recessed high voltage metal oxide semiconductor (MOS) transistor is provided for use in a two-terminal memory cell. The two-terminal memory cell can include a resistive switching device connected to the recessed MOS transistor. The recessed MOS transistor provides for an increased channel length relative to the transistor size in comparison to a traditional MOS transistor. This allows for a decreased memory cell size while maintaining comparable electrical parameters (threshold voltage, channel length, and leakage) than would otherwise be possible. The recessed MOS transistor can be made as either a NMOS or PMOS device using n-type or p-type materials respectively, where the channel, or inversion layer, is formed by electrons (NMOS) or holes (PMOS) between the source and drain in the transistor.
Public/Granted literature
- US20160351625A1 RECESSED HIGH VOLTAGE METAL OXIDE SEMICONDUCTOR TRANSISTOR FOR RRAM CELL Public/Granted day:2016-12-01
Information query
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