- Patent Title: Integrated semiconductor device and manufacturing method therefor
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Application No.: US15794876Application Date: 2017-10-26
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Publication No.: US10128231B2Publication Date: 2018-11-13
- Inventor: Zhongshan Hong
- Applicant: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
- Applicant Address: CN
- Assignee: Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN
- Agency: Innovation Counsel LLP
- Priority: CN201110410241 20111212
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/461 ; H01L21/8234 ; H01L27/06 ; H01L27/08 ; H01L49/02 ; H01L29/66 ; H01L29/772

Abstract:
An integrated device includes a field effect transistor formed within and upon an active region of a substrate and a resistor formed on an isolation region of the substrate. The field effect transistor includes a gate stacked structure having respective portions of a dielectric layer, a first conductive layer and a second conductive layer arranged in order from bottom to top. The resistor includes a resistor body being an enclosure portion of the first conductive layer and resistor terminals being portions of the second conductive layer on distal ends of the resistor body. A method for manufacturing a semiconductor device includes forming a gate stacked structure and a resistor stacked structure at the same time by patterning a dielectric layer, a first conductive layer and a second conductive layer. The method also includes forming a resistor having a resistor body by patterning the resistor stacked structure.
Public/Granted literature
- US20180047724A1 INTEGRATED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2018-02-15
Information query
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