Invention Grant
- Patent Title: Memory devices
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Application No.: US15224238Application Date: 2016-07-29
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Publication No.: US10128263B2Publication Date: 2018-11-13
- Inventor: Seok Cheon Baek , Young Woo Kim , Dong Sik Lee , Min Yong Lee , Woong Seop Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Ward and Smith, P.A.
- Priority: KR10-2015-0186005 20151224
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/11582 ; H01L23/522 ; H01L23/528 ; H01L27/11521 ; H01L27/11526 ; H01L27/11556 ; H01L27/11568 ; H01L27/11573 ; H01L29/06

Abstract:
A memory device may include multiple channel regions extending in a direction perpendicular to an upper surface of a substrate, a plurality of gate electrode layers and a plurality of insulating layers stacked on the substrate to be adjacent at least a portion of the plurality of channel regions, an interlayer insulating layer disposed on the plurality of gate electrode layers, a plurality of cell contact plugs passing through the interlayer insulating layer. Each of the plurality of cell contacts is connected to each of the plurality of gate electrode layers. A vertical insulating layer extends from the interlayer insulating layer disposed between the plurality of channel regions and the plurality of cell contact plugs and has a portion surrounded by at least one of the plurality of gate electrode layers.
Public/Granted literature
- US20170186767A1 MEMORY DEVICES Public/Granted day:2017-06-29
Information query
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