Invention Grant
- Patent Title: Gate tie-down enablement with inner spacer
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Application No.: US15432372Application Date: 2017-02-14
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Publication No.: US10128352B2Publication Date: 2018-11-13
- Inventor: Su Chen Fan , Andre P. Labonte , Lars W. Liebmann , Sanjay C. Mehta
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION , GLOBALFOUNDRIES Inc.
- Applicant Address: US NY Armonk KY Grand Cayman
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,GLOBALFOUNDRIES INC.
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,GLOBALFOUNDRIES INC.
- Current Assignee Address: US NY Armonk KY Grand Cayman
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L29/66 ; H01L21/768 ; H01L21/027 ; H01L27/11 ; H01L21/311 ; H01L23/522 ; H01L23/528

Abstract:
A gate tie-down structure includes a gate structure including a gate conductor and gate spacers and inner spacers formed on the gate spacers. Trench contacts are formed on sides of the gate structure. An interlevel dielectric (ILD) has a thickness formed over the gate structure. A horizontal connection is formed within the thickness of the ILD over an active area connecting the gate conductor and one of the trench contacts over one of the inner spacers.
Public/Granted literature
- US20170162438A1 GATE TIE-DOWN ENABLEMENT WITH INNER SPACER Public/Granted day:2017-06-08
Information query
IPC分类: