Invention Grant
- Patent Title: Method for manufacturing an electrical contact on a structure
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Application No.: US15619931Application Date: 2017-06-12
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Publication No.: US10134594B2Publication Date: 2018-11-20
- Inventor: Raphael Ramos , Jean Dijon
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1655432 20160613
- Main IPC: H01L21/265
- IPC: H01L21/265 ; H01L21/02

Abstract:
The invention relates to a method for manufacture of an electrical contact on a structure (10) made of an anisotropic material NA which exhibits an anisotropic electrical conductivity, where the structure (10) exhibits an axial electrical conductivity along a first axis XX′ of the structure (10) and an orthogonal conductivity along a direction YY′ orthogonal to the first axis XX′ of the structure (10), where the orthogonal conductivity is less than the axial conductivity, where the method comprises: a step for the formation of a conductive electrode (20), with an initial thickness Ei, comprising a species M, on a first surface (30) of the structure (10), where the first surface (30) is orthogonal to the orthogonal direction YY′; the method being characterized in that the step for the formation of the conductive electrode (20) is followed by a step for implantation of species X through the conductive electrode (20), into the structure (10).
Public/Granted literature
- US20170358451A1 METHOD FOR MANUFACTURlNG AN ELECTRICAL CONTACT ON A STRUCTURE Public/Granted day:2017-12-14
Information query
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