Invention Grant
- Patent Title: Substrates storing container
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Application No.: US14895890Application Date: 2013-06-03
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Publication No.: US10134618B2Publication Date: 2018-11-20
- Inventor: Yuta Kanamori
- Applicant: MIRAIAL CO., LTD. , SHIN-ETSU POLYMER CO., LTD.
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: MIRAIAL CO., LTD.,SHIN-ETSU POLYMER CO., LTD.
- Current Assignee: MIRAIAL CO., LTD.,SHIN-ETSU POLYMER CO., LTD.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- International Application: PCT/JP2013/065415 WO 20130603
- International Announcement: WO2014/196011 WO 20141211
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
The bottom plate has a plate-like shape, is arranged to face an outer face of a lower wall, and has a locking portion. The groove member has: a groove-forming portion having a groove opening downward formed therein, a surrounding wall portion, which is connected to the groove-forming portion, and is arranged around the groove-forming portion; and a locked portion, which is connected to the surrounding wall portion, is elastically deformable, and is locked by way of the locking portion of the bottom plate by being elastically deformed. The groove member is supported and fixed by way of the lower wall and the bottom plate.
Public/Granted literature
- US20160126122A1 SUBSTRATE STORING CONTAINER Public/Granted day:2016-05-05
Information query
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