Invention Grant
- Patent Title: Substrate alignment detection using circumferentially extending timing pattern
-
Application No.: US15917043Application Date: 2018-03-09
-
Publication No.: US10134624B2Publication Date: 2018-11-20
- Inventor: Douglas M. Carson , Mike Chatterton , Stephen Houser , Bryan Whitfield
- Applicant: Doug Carson & Associates, Inc.
- Applicant Address: US OK Cushing
- Assignee: Doug Carson & Associates, Inc.
- Current Assignee: Doug Carson & Associates, Inc.
- Current Assignee Address: US OK Cushing
- Agency: Hall Estill Attorneys at Law
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/68 ; H01L23/544 ; H01L21/67 ; H01J37/20 ; H01J37/30

Abstract:
Apparatus and method for aligning a rotatable substrate to a support mechanism to write a feature to the substrate, and a substrate so configured. In some embodiments, the substrate has a circumferentially extending timing pattern with spaced apart first and second timing marks disposed on opposing sides of a center point of the timing pattern and an identification (ID) field that stores a unique identifier value associated with the substrate. Upon mounting of the substrate to a support mechanism that rotates the substrate about a central axis that is offset from the center point, a control circuit generates a compensation value to compensate for the offset using the first and second timing marks and outputs a process instruction to authorize processing of the substrate using the unique identifier value. In some cases, the unique identifier value is used as a lookup to a computerized database.
Public/Granted literature
- US20180197763A1 Substrate Alignment Detection Using Circumferentially Extending Timing Pattern Public/Granted day:2018-07-12
Information query
IPC分类: