Invention Grant
- Patent Title: Scanning acoustic microscope sensor array for chip-packaging interaction package reliability monitoring
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Application No.: US14988893Application Date: 2016-01-06
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Publication No.: US10134649B2Publication Date: 2018-11-20
- Inventor: Taryn J. Davis , Jonathan R. Fry , Tuhin Sinha
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Steven Meyers
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/56 ; H01L21/48 ; H01L23/498 ; G01N29/06 ; G01N29/04

Abstract:
A method includes forming a flip-chip module including a chip connected to a substrate with a layer of underfill material adhered to the chip and the substrate; sensing chip-packaging interaction failure in the underfilled flip-chip module in situ; reporting in-situ chip-packaging interaction failure to a device in real-time; and imaging the chip-packaging interaction failure with an indirect scanning acoustic microscope.
Public/Granted literature
- US20170194221A1 SCANNING ACOUSTIC MICROSCOPE SENSOR ARRAY FOR CHIP-PACKAGING INTERACTION PACKAGE RELIABILITY MONITORING Public/Granted day:2017-07-06
Information query
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