Invention Grant
- Patent Title: Cobalt top layer advanced metallization for interconnects
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Application No.: US15813622Application Date: 2017-11-15
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Publication No.: US10134675B2Publication Date: 2018-11-20
- Inventor: Daniel C Edelstein , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Jeffrey S LaBaw; Steven J Meyers
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L23/522 ; H01L21/768 ; H01L21/285 ; H01L23/528

Abstract:
An advanced metal conductor structure is described. An integrated circuit device including a substrate having a patterned dielectric layer. The pattern includes a set of features in the dielectric for a set of metal conductor structures. An adhesion promoting layer is disposed over the set of features in the patterned dielectric. A metal layer fills a first portion of the set of features and is disposed over the adhesion promoting layer. A ruthenium layer is disposed over the metal layer. A cobalt layer is disposed over the ruthenium layer fills a second portion of the set of features. The cobalt layer is formed using a physical vapor deposition process.
Public/Granted literature
- US20180082957A1 COBALT TOP LAYER ADVANCED METALLIZATION FOR INTERCONNECTS Public/Granted day:2018-03-22
Information query
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