Invention Grant
- Patent Title: Conductive layers with different thicknesses
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Application No.: US15462259Application Date: 2017-03-17
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Publication No.: US10134745B2Publication Date: 2018-11-20
- Inventor: Jhon Jhy Liaw
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L29/78 ; H01L27/02 ; H01L23/528 ; H01L27/108

Abstract:
A semiconductor chip includes: a first conductive line formed in a first conductive layer, a second conductive line formed in a second conductive layer, and a third conductive line formed in a third conductive layer; wherein the first conductive line is longer than the second conductive line substantially along a first direction, the second conductive line is longer than the first conductive line and the third conductive line substantially along a second direction, the third conductive line is longer than the second conductive line substantially along the first direction, the first conductive layer has a thickness which is thicker than that of the second conductive layer, and the third conductive layer has a thickness which is substantially equal to or thicker than that of the first conductive layer.
Public/Granted literature
- US20170194331A1 CONDUCTIVE LAYERS WITH DIFFERENT THICKNESSES Public/Granted day:2017-07-06
Information query
IPC分类: