Invention Grant
- Patent Title: Method of manufacturing amorphous IGZO TFT-based transient semiconductor
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Application No.: US15133930Application Date: 2016-04-20
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Publication No.: US10134913B2Publication Date: 2018-11-20
- Inventor: Sung-Hun Jin
- Applicant: INCHEON UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION
- Applicant Address: KR Incheon
- Assignee: INCHEON UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION
- Current Assignee: INCHEON UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION
- Current Assignee Address: KR Incheon
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent George S. Blasiak
- Priority: KR10-2015-0056186 20150421
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L29/786 ; H01L27/12 ; H01L29/66

Abstract:
Disclosed is a method of manufacturing an a-IGZO TFT-based transient semiconductor. The method includes (a) stacking a thermal oxide layer on a silicon substrate and depositing a nickel thin layer; (b) forming a PECVD layer on the nickel thin layer; (c) patterning the PECVD layer after setting a gate area and depositing a metallic layer; (d) lifting off the metallic layer to form a gage metallic thin layer and depositing a gage insulating layer on the gate metallic thin layer; (e) depositing an a-IGZO layer on the gate insulating layer; (f) etching an active area and the gate insulating layer; (g) forming a source electrode and a drain electrode and attaching a thermal release tape on the source electrode and the drain electrode; (h) delaminating the nickel thin layer; (i) performing transcription on a polyvinyl alcohol thin layer after etching the nickel thin layer; and (j) detaching the tape.
Public/Granted literature
- US20160315200A1 METHOD OF MANUFACTURING AMORPHOUS IGZO TFT-BASED TRANSIENT SEMICONDUCTOR Public/Granted day:2016-10-27
Information query
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