Invention Grant
- Patent Title: Piezoelectric element, liquid discharging head provided with piezoelectric element, and liquid discharging apparatus
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Application No.: US15583248Application Date: 2017-05-01
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Publication No.: US10134976B2Publication Date: 2018-11-20
- Inventor: Motoki Takabe , Eiju Hirai , Toshihiro Shimizu , Naoto Yokoyama , Eiji Osawa
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Workman Nydegger
- Priority: JP2015-077375 20150406
- Main IPC: H01L41/187
- IPC: H01L41/187 ; B41J2/14 ; H01L41/047 ; H01L41/083 ; H01L41/27 ; B41J2/16 ; H01L41/277 ; H01L41/08 ; H01L41/09

Abstract:
The piezoelectric body is configured to have a layered structure such that a plurality of unit layers are stacked in a film thickness direction, and each of the unit layers is formed of a first layer on which the displacement is relatively easy to occur, and a second layer which has a high concentration of Zr as compared with the first layer. In addition, when composition ratio Ti/(Zr+Ti) of Zr to Ti in each of the first layer and the second layer is set as Cr1 and Cr2, the composition ratio of each layer is adjusted so as to satisfy the following conditions (1) to (3): 0.41≤Cr1≤0.81 (1) 0.1≤Cr1−Cr2≤0.3 (2) Cr1>Cr2 (3).
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