Invention Grant
- Patent Title: Terminal for mechanical support of a heating element
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Application No.: US13568928Application Date: 2012-08-07
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Publication No.: US10136472B2Publication Date: 2018-11-20
- Inventor: Arno Plankensteiner , Christian Feist , Vadim Boguslavskiy , Alexander I. Gurary , Chenghung Paul Chang
- Applicant: Arno Plankensteiner , Christian Feist , Vadim Boguslavskiy , Alexander I. Gurary , Chenghung Paul Chang
- Applicant Address: AT Reutte US NY Plainview
- Assignee: Plansee SE,Veeco Instruments Inc.
- Current Assignee: Plansee SE,Veeco Instruments Inc.
- Current Assignee Address: AT Reutte US NY Plainview
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- Main IPC: H05B1/00
- IPC: H05B1/00 ; C23C16/458 ; C23C16/46 ; H01L21/67
Abstract:
A terminal for mechanical support of a heating element, includes a base device, a mounting device, the mounting device adapted to support the heating element, and a support device connecting the base device to the mounting device, the support device allowing displacement of the heating element about a radial axis and less than about 10% displacement of the heating element about a tangential and/or axial axis.
Public/Granted literature
- US20140042147A1 TERMINAL FOR MECHANICAL SUPPORT OF A HEATING ELEMENT Public/Granted day:2014-02-13
Information query
