- Patent Title: Three dimensional memory device and method for fabricating the same
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Application No.: US15379527Application Date: 2016-12-15
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Publication No.: US10141328B2Publication Date: 2018-11-27
- Inventor: Hang-Ting Lue , Wei-Chen Chen
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L21/02

Abstract:
A 3D memory device includes a substrate, a ridge-shaped stack, a memory layer, a channel layer and a capping layer. The ridge-shaped stack includes a plurality of conductive strips extending along a first direction and stacked on the substrate. The memory layer is stacked on a vertical sidewall of the ridge-shaped stack along a second direction that forms a non-straight with the first direction. The channel layer is stacked on the memory layer along the second direction and has a narrow sidewall having a long side extending along the first direction. The capping layer is stacked on the narrow sidewall along a third direction that forms a non-straight angle with the second direction.
Public/Granted literature
- US20180175051A1 THREE DIMENSIONAL MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2018-06-21
Information query
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