Invention Grant
- Patent Title: Method for manufacturing semiconductor memory device and semiconductor memory device
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Application No.: US15440025Application Date: 2017-02-23
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Publication No.: US10141329B2Publication Date: 2018-11-27
- Inventor: Hirotaka Tsuda , Yusuke Oshiki
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Tokyo
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2014-221032 20141030
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L21/311 ; H01L21/02 ; H01L27/11565 ; H01L29/66 ; H01L29/792

Abstract:
According to one embodiment, a method for manufacturing a semiconductor memory device includes simultaneously forming a plurality of first holes and a plurality of second holes in a stacked body. The stacked body includes a plurality of first layers and a plurality of second layers. The method includes etching a portion between the second holes next to each other in the stacked body, and connecting at least two or more second holes to form a groove. The method includes forming a film including a charge storage film on a sidewall of the first holes. The method includes forming a channel film on a sidewall of the film including the charge storage film.
Public/Granted literature
- US20170162596A1 METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE AND SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2017-06-08
Information query
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