Invention Grant
- Patent Title: Thin-film-transistor, thin-film-transistor array substrate, fabricating methods thereof, and display panel
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Application No.: US15108678Application Date: 2015-12-10
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Publication No.: US10141340B2Publication Date: 2018-11-27
- Inventor: Guangcai Yuan , Liangchen Yan , Xiaoguang Xu , Lei Wang , Junbiao Peng , Linfeng Lan
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , South China University of Technology
- Applicant Address: CN Beijing CN Guangzhou
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,SOUTH CHINA UNVIERSITY OF TECHNOLOGY
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,SOUTH CHINA UNVIERSITY OF TECHNOLOGY
- Current Assignee Address: CN Beijing CN Guangzhou
- Agency: Anova Law Group, PLLC
- Priority: CN201510400941 20150709
- International Application: PCT/CN2015/096953 WO 20151210
- International Announcement: WO2017/004939 WO 20170112
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L27/15 ; H01L27/12 ; H01L21/28 ; H01L29/786 ; H01L29/49 ; H01L29/66

Abstract:
In accordance with some embodiments of the disclosed subject matter, a TFT, a related TFT array substrate, fabricating methods thereof, a display panel and a display device containing the same are provided. A method for fabricating a TFT is provided, the method comprising: forming an initial conductive layer on a base substrate; performing an oxidization process to partially oxidize the initial conductive layer to form an oxidized insulating sub-layer and a non-oxidized conductive sub-layer; and forming an active layer, a source electrode and a drain electrode over the oxidized insulating sub-layer.
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