Invention Grant
- Patent Title: Polishing composition and polishing method using the same
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Application No.: US12864811Application Date: 2009-01-29
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Publication No.: US10144849B2Publication Date: 2018-12-04
- Inventor: Takahiro Mizuno , Yoshihiro Izawa , Tomohiko Akatsuka
- Applicant: Takahiro Mizuno , Yoshihiro Izawa , Tomohiko Akatsuka
- Applicant Address: JP Kiyosu-shi, Aichi-ken
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu-shi, Aichi-ken
- Agency: Vidas, Arrett & Steinkraus, P.A.
- Priority: JP2008-023229 20080201; JP2008-151969 20080610
- International Application: PCT/JP2009/051510 WO 20090129
- International Announcement: WO2009/096495 WO 20090806
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/02 ; H01L21/3105 ; H01L21/321 ; C09K3/14

Abstract:
A polishing composition contains a nitrogen-containing compound and abrasive grains, and the pH of the composition is in the range of 1 to 7. The nitrogen-containing compound in the polishing composition preferably has a structure expressed by a formula: R1—N(—R2)—R3 in which R1, R2, and R3 each represent an alkyl group with or without a characteristic group, two of R1 to R3 may form a part of a heterocycle, and two of R1 to R3 may be identical and form a part of a heterocycle with the remaining one. Alternatively, the nitrogen-containing compound is preferably selected from a group consisting of a carboxybetaine type ampholytic surfactant, a sulfobetaine type ampholytic surfactant, an imidazoline type ampholytic surfactant, and an amine oxide type ampholytic surfactant. A polishing composition may contain a water-soluble polymer and abrasive grains, and the pH of the composition is in the range of 1 to 8.
Public/Granted literature
- US20100301014A1 Polishing Composition and Polishing Method Using the Same Public/Granted day:2010-12-02
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