Invention Grant
- Patent Title: Integrated particle and light filter for MEMS device
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Application No.: US15726306Application Date: 2017-10-05
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Publication No.: US10149032B2Publication Date: 2018-12-04
- Inventor: Janhavi S. Agashe , Anthony D. Minervini , Ruchir M. Dave , Jae H. Lee
- Applicant: Apple Inc.
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Womble Bond Dickinson (US) LLP
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H04R1/08 ; B81B3/00 ; G02B5/20 ; H04R19/00 ; H04R19/04 ; G02B5/26

Abstract:
A micro-electro-mechanical system (MEMS) transducer including an enclosure defining an interior space and having an acoustic port formed through at least one side of the enclosure. The transducer further including a compliant member positioned within the interior space and acoustically coupled to the acoustic port, the compliant member being configured to vibrate in response to an acoustic input. A back plate is further positioned within the interior space, the back plate being positioned along one side of the compliant member in a fixed position. A filter is positioned between the compliant member and the acoustic port, and the filter includes a plurality of axially oriented pathways and a plurality of laterally oriented pathways which are acoustically interconnected and dimensioned to prevent passage of a particle from the acoustic port to the compliant member.
Public/Granted literature
- US20180220216A1 INTEGRATED PARTICLE AND LIGHT FILTER FOR MEMS DEVICE Public/Granted day:2018-08-02
Information query
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