Invention Grant
- Patent Title: Physical quantity sensor having a frame-shaped movable mass, electronic device, and mobile body
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Application No.: US15195055Application Date: 2016-06-28
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Publication No.: US10151771B2Publication Date: 2018-12-11
- Inventor: Shota Kigure , Satoru Tanaka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2015-138780 20150710
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B81B3/00 ; G01P15/08
Abstract:
A physical quantity sensor includes a movable electrode side fixed section, a first fixed electrode side fixed section which has a first fixed electrode section and a second fixed electrode side fixed section which has a second fixed electrode section, a movable mass section which has a first movable electrode section that has a portion facing the first fixed electrode section and a second movable electrode section that has a portion facing the second fixed electrode section and which is formed in a shape that encloses the movable electrode side fixed section, the first fixed electrode side fixed section, and the second fixed electrode side fixed section in planar view, and an elastic section which connects the movable electrode side fixed section and the movable mass section.
Public/Granted literature
- US20170010300A1 PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY Public/Granted day:2017-01-12
Information query
IPC分类:
