- Patent Title: Semiconductor device and method for forming a semiconductor device
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Application No.: US15708209Application Date: 2017-09-19
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Publication No.: US10153339B2Publication Date: 2018-12-11
- Inventor: Stephan Voss , Alexander Breymesser , Hans-Joachim Schulze , Yvonne Gawlina-Schmidl
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: DE102016118012 20160923
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/225 ; H01L21/265 ; H01L21/324 ; H01L29/10 ; H01L29/739 ; H01L29/78

Abstract:
A semiconductor device includes a common doping region located within a semiconductor substrate of the semiconductor device. The common doping region includes a first portion. A maximal doping concentration within the first portion is higher than 1·1015 cm−3. The common doping region includes a second portion. A minimal doping concentration within the second portion is lower than 50% of the maximal doping concentration within the first portion of the common doping region. The common doping region includes a third portion. A minimal doping concentration within the third portion is more than 30% higher than the minimal doping concentration within the second portion. The second portion of the common doping region is located vertically between the first portion of the common doping region and the third portion of the common doping region.
Public/Granted literature
- US20180090565A1 Semiconductor Device and Method for Forming a Semiconductor Device Public/Granted day:2018-03-29
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