Control circuit of piezoelectric driving device, piezoelectric driving device, ultrasonic motor, robot, hand, and pump
Abstract:
A control circuit of a piezoelectric driving device includes: a signal generation unit that inputs a state inspection signal to a plurality of piezoelectric elements connected to each other in parallel; and a state detection unit that detects a state of the plurality of piezoelectric elements based on a state detection signal generated from the plurality of piezoelectric elements in accordance with the state inspection signal.
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