Invention Grant
- Patent Title: Memory device and method for manufacturing the same
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Application No.: US15684306Application Date: 2017-08-23
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Publication No.: US10157964B2Publication Date: 2018-12-18
- Inventor: Kiyohito Nishihara
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
A memory device according to one embodiment includes a resistance change film, an insulating film provided on the resistance change film, a first wiring provided on the insulating film and being not in contact with the resistance change film, and a high resistance film having a higher resistivity than the first wiring. The high resistance film is provided on a side surface of a stacked body including the insulating film and the first wiring, and the high resistance film is electrically connected between the first wiring and the resistance change film.
Public/Granted literature
- US20170352705A1 MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2017-12-07
Information query
IPC分类: