The present invention provides a detection device, a detection method and a detection system, which are used for detecting damaged condition of a substrate. The detection device includes a probe unit and a judgement unit, and the probe unit includes a probe, a speed detection module and a driving force control module both provided on the probe, wherein the bottom end of the probe is used for contacting with the substrate to be detected; the speed detection module is used for obtaining a real-time speed of the probe in a process of detection and transmitting the real-time speed to the judgement unit; the driving force control module is used for applying a constant driving force to the probe; and the judgement unit is used for receiving the real-time speed of the probe and judging the damaged condition of the substrate to be detected according to the real-time speed.