Invention Grant
- Patent Title: Temperature control method and plasma processing apparatus
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Application No.: US15175229Application Date: 2016-06-07
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Publication No.: US10163607B2Publication Date: 2018-12-25
- Inventor: Keigo Toyoda , Hiroshi Tsujimoto
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP2015-118072 20150611
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A method for controlling the temperature of a mounting table in a plasma processing apparatus, includes: calculating a first heat input amount according to high frequency power applied in a given process, wherein the first heat input amount is calculated based on a data table, the data table being generated by measuring temperatures so as to find a first relationship between the high frequency power applied in the plasma processing apparatus and the heat input amount to the mounting table; controlling, based on an operation map, the temperature of at least one of the first heating mechanism and the cooling mechanism so that a first temperature difference between the cooling mechanism and the first heating mechanism is within a controllable range corresponding to the first heat input amount, wherein the temperature of the first heating mechanism is controllable upon the first temperature difference falling within the controllable.
Public/Granted literature
- US20160365229A1 TEMPERATURE CONTROL METHOD AND PLASMA PROCESSING APPARATUS Public/Granted day:2016-12-15
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