Invention Grant
- Patent Title: Linear wafer drive for handling wafers during semiconductor fabrication
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Application No.: US12054160Application Date: 2008-03-24
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Publication No.: US10163667B2Publication Date: 2018-12-25
- Inventor: J. B. Price , Jed Keller , Laurence Dulmage , David Adams , Eric Winger , Lawrence Wise
- Applicant: J. B. Price , Jed Keller , Laurence Dulmage , David Adams , Eric Winger , Lawrence Wise
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Martine Penilla Group, LLP
- Main IPC: B65G29/00
- IPC: B65G29/00 ; H01L21/67 ; H01L21/677
Abstract:
A modular cluster tool is disclosed. According to one embodiment, a system, comprises a wafer transfer station that includes a first vacuum chamber that stores a plurality of semiconductor wafers. The system also includes an equipment front end module interface, and two or more shuttle lock interfaces.
Public/Granted literature
- US20080232934A1 MODULAR CLUSTER TOOL Public/Granted day:2008-09-25
Information query
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