Invention Grant
- Patent Title: Thermal sensor arrangement and method of making the same
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Application No.: US14713183Application Date: 2015-05-15
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Publication No.: US10163686B2Publication Date: 2018-12-25
- Inventor: Jaw-Juinn Horng , Szu-Lin Liu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: G01K7/01
- IPC: G01K7/01 ; H01L21/765 ; G01R31/28 ; G01K1/16

Abstract:
A temperature sensor arrangement in an integrated circuit (IC) includes a sensor array configured to determine a temperature of the IC. The sensor array includes a first transistor having a first terminal, a second terminal and a gate. The temperature sensor array further includes a guard ring region between the sensor array and another circuit of the IC. The guard ring region includes a transistor structure having a first terminal, a second terminal and a gate. The temperature sensor arrangement further includes a thermally conductive element connected to the transistor structure and a first terminal of the first transistor. The thermally conductive element is configured to provide a thermally conductive path from the transistor structure to the first terminal of the first transistor.
Public/Granted literature
- US20160290873A1 THERMAL SENSOR ARRANGEMENT AND METHOD OF MAKING THE SAME Public/Granted day:2016-10-06
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