Invention Grant
- Patent Title: Semiconductor device and method of controlling warpage in reconstituted wafer
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Application No.: US15461713Application Date: 2017-03-17
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Publication No.: US10163747B2Publication Date: 2018-12-25
- Inventor: Kian Meng Heng , Hin Hwa Goh , Jose Alvin Caparas , Kang Chen , Seng Guan Chow , Yaojian Lin
- Applicant: STATS ChipPAC Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L23/31 ; H01L21/78 ; H01L23/00

Abstract:
A semiconductor device has a substrate with a plurality of active semiconductor die disposed over a first portion of the substrate and a plurality of non-functional semiconductor die disposed over a second portion of the substrate while leaving a predetermined area of the substrate devoid of the active semiconductor die and non-functional semiconductor die. The predetermined area of the substrate devoid of the active semiconductor die and non-functional semiconductor die includes a central area, checkerboard pattern, linear, or diagonal area of the substrate. The substrate can be a circular shape or rectangular shape. An encapsulant is deposited over the active semiconductor die, non-functional semiconductor die, and substrate. An interconnect structure is formed over the semiconductor die. The absence of active semiconductor die and non-functional semiconductor die from the predetermined areas of the substrate reduces bending stress in that area of the substrate.
Public/Granted literature
- US20170194228A1 Semiconductor Device and Method of Controlling Warpage in Reconstituted Wafer Public/Granted day:2017-07-06
Information query
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