Invention Grant
- Patent Title: Alignment pattern for package singulation
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Application No.: US15640975Application Date: 2017-07-03
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Publication No.: US10163807B2Publication Date: 2018-12-25
- Inventor: Ying-Ju Chen , Der-Chyang Yeh , Hsien-Wei Chen , Shih-Peng Tai
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L23/544
- IPC: H01L23/544 ; B81C99/00 ; H01L21/56 ; H01L21/68 ; H01L21/683 ; H01L21/78 ; H01L23/31 ; H01L23/538 ; H01L23/58 ; H01L23/00 ; H01L25/065

Abstract:
A method includes forming an alignment pattern over an insulating layer formed over a carrier. A die is mounted over the carrier and encapsulated. Connectors are formed and the structure is attached to a debond tape. The carrier is removed. A cutting device is aligned to a backside of the insulating layer using the alignment pattern. The first insulating layer and encapsulant are cut from the backside of the insulating layer. Another method includes scanning a backside of a packages structure for an alignment pattern in a first package area of the packages structure. A cutting device is aligned to a cut-line in a non-package area of the packages structure based on the alignment pattern and packages are singulated. An InFO package includes an insulating layer on the backside, the insulating layer having a laser marking thereon. The InFO package also includes an alignment pattern proximate to the insulating layer.
Public/Granted literature
- US20180151507A1 Alignment Pattern for Package Singulation Public/Granted day:2018-05-31
Information query
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