- Patent Title: Image device having multi-layered refractive layer on back surface
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Application No.: US15072887Application Date: 2016-03-17
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Publication No.: US10163949B2Publication Date: 2018-12-25
- Inventor: Chih-Yu Lai , Min-Ying Tsai , Yeur-Luen Tu , Hai-Dang Trinh , Cheng-Yuan Tsai
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L27/146
- IPC: H01L27/146
Abstract:
An image sensor device is disclosed. The image sensor device includes: a substrate having a front surface and a back surface; a radiation-sensing region formed in the substrate; an opening extending from the back surface of the substrate into the substrate; a first metal oxide film including a first metal, the first metal oxide film being formed on an interior surface of the opening; and a second metal oxide film including a second metal, the second metal oxide film being formed over the first metal oxide film; wherein the electronegativity of the first metal is greater than the electronegativity of the second metal. An associated fabricating method is also disclosed.
Public/Granted literature
- US20170271383A1 IMAGE DEVICE HAVING MULTI=LAYERED REFRACTIVE LAYER ON BACK SURFACE Public/Granted day:2017-09-21
Information query
IPC分类:
