Invention Grant
- Patent Title: Semiconductor device and method of fabricating the same
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Application No.: US15604687Application Date: 2017-05-25
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Publication No.: US10164030B2Publication Date: 2018-12-25
- Inventor: Jin-bum Kim , Chul-sung Kim , Deok-han Bae , Bon-young Koo
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2014-0127189 20140923
- Main IPC: H01L29/41
- IPC: H01L29/41 ; H01L21/82 ; H01L27/092 ; H01L29/66 ; H01L29/417 ; H01L29/78 ; H01L29/165 ; H01L21/8238

Abstract:
A semiconductor device may include a substrate including an NMOS region and a PMOS region, and having a protrusion pattern; first and second gate structures respectively formed on the NMOS region and the PMOS region of the substrate, crossing the protrusion pattern, and extending along a first direction that is parallel to an upper surface of the substrate; first and second source/drain regions formed on both sides of the first and second gate structures; and first and second contact plugs respectively formed on the first and second source/drain regions, wherein the first contact plug and the second contact plug are asymmetric. Methods of manufacturing are also provided.
Public/Granted literature
- US20170271462A1 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2017-09-21
Information query
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