Invention Grant
- Patent Title: Silicon carbide semiconductor device and manufacturing method therefor
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Application No.: US15511424Application Date: 2015-01-07
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Publication No.: US10164083B2Publication Date: 2018-12-25
- Inventor: Yuji Ebiike
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- International Application: PCT/JP2015/050245 WO 20150107
- International Announcement: WO2016/110953 WO 20160714
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/16 ; H01L29/417 ; H01L29/45 ; H01L29/47 ; H01L29/66 ; H01L29/06 ; H01L29/08 ; H01L29/10 ; H01L29/872

Abstract:
A silicon carbide semiconductor device includes an ohmic electrode and a Schottky electrode that are in contact with the drain electrode respectively on the drain electrode and are next to each other; a first conductivity type first withstand voltage holding region in contact with the ohmic electrode on the ohmic electrode; a second conductivity type second withstand voltage holding region in contact with the Schottky electrode on the Schottky electrode and is next to the first withstand voltage holding region; a second conductivity type well region in contact onto the first and second withstand voltage holding regions; a first conductivity type source region selectively provided on a surface layer of the well region; and a gate electrode opposite to a channel region defined by the well region sandwiched between the source region and the first withstand voltage holding region, with a gate oxide film interposed therebetween.
Public/Granted literature
- US20170301783A1 SILICON CARBIDE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR Public/Granted day:2017-10-19
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