Invention Grant
- Patent Title: MEMS component and method for encapsulating MEMS components
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Application No.: US15820471Application Date: 2017-11-22
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Publication No.: US10164166B2Publication Date: 2018-12-25
- Inventor: Hans Krüger , Alois Stelzl , Christian Bauer , Jürgen Portmann , Wolfgang Pahl
- Applicant: SnapTrack, Inc.
- Applicant Address: US CA San Diego
- Assignee: SnapTrack, Inc.
- Current Assignee: SnapTrack, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Patterson & Sheridan, L.L.P.
- Priority: DE102012112058 20121211
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L41/23 ; H01L41/113 ; H01L41/083 ; H01L41/053 ; H01L41/27 ; H01L41/293 ; B81B7/00 ; H03H9/05 ; H01L41/297 ; H01L23/00

Abstract:
A MEMS component includes, on a substrate, component structures, contact areas connected to the component structures, metallic column structures seated on the contact areas, and metallic frame structures surrounding the component structures. A cured resist layer is seated on frame structure and column structures such that a cavity is enclosed between substrate, frame structure and resist layer. A structured metallization is provided directly on the resist layer or on a carrier layer seated on the resist layer. The structured metallization includes at least external contacts of the component and being electrically conductively connected both to metallic structures and to the contact areas of the component structures.
Public/Granted literature
- US20180097172A1 MEMS COMPONENT AND METHOD FOR ENCAPSULATING MEMS COMPONENTS Public/Granted day:2018-04-05
Information query
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