Invention Grant
- Patent Title: Semiconductor light-emitting device and method for manufacturing the same
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Application No.: US15439583Application Date: 2017-02-22
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Publication No.: US10164409B2Publication Date: 2018-12-25
- Inventor: Philip Rackow , Yusuke Yokobayashi , Keijiro Takashima
- Applicant: STANLEY ELECTRIC CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: STANLEY ELECTRIC CO., LTD.
- Current Assignee: STANLEY ELECTRIC CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: JP2016-031656 20160223
- Main IPC: H01S5/32
- IPC: H01S5/32 ; H01S5/22 ; H01S5/042 ; H01S5/24 ; H01S5/02 ; H01S5/323

Abstract:
A method for manufacturing a semiconductor light-emitting device includes: forming a plurality of guide grooves so as to be depressed from a surface of a semiconductor structure layer toward a semiconductor substrate and to align and extend along a direction perpendicular to an extending direction of a plurality of line electrodes; forming, in each of the plurality of guide grooves, a scribe groove so as to be depressed from a bottom surface of the guide groove toward the semiconductor substrate and to extend along an extending direction of the guide groove; and dividing a semiconductor wafer along the plurality of guide grooves. The guide groove and the scribe groove are formed to have end shapes in such a manner that inner walls thereof project toward each other in the extending direction of the scribe groove.
Public/Granted literature
- US20170244220A1 SEMICONDUCTOR LIGHT-EMITTING DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2017-08-24
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